第一次学这个,谁能教教我
作业要求;1.解释语句的意思2.增加语句,能画出每一步的仿真图
go at
第一次学这个,谁能教教我 作业要求;1.解释语句的意思2.增加语句,能画出每一步的仿真图 go athena #TITLE: Poly Buffered LOCOS Example # line x loc=-1.5 spac=0.1 line x loc=-0.4 spac=0.02 line x loc=0.0 spac=0.02 line x loc=0.7 spac=0.2 # line y loc=0 line y loc=0.2 spac=0.08 line y loc=1 initialize orient=100 oxide ori.dep=f # # Pad oxide and nitride mask deposit oxide thick=0.02 div=1 deposit poly thick=0.1 div=4 deposit nitride thick=0.15 div=3 etch nitride left p1.x=-0.4 # tonyplot # # Field oxidation method fermi compress diffuse time=120 temp=1000 weto2 # structure outfile=anoxex05.str # tonyplot anoxex05.str quit